The plane mirror is one of the basic optical components in optics. It is used to separate the environments on both sides and isolate the inside of the instrument from the outside, thereby protecting the internal components. Its substrate materials include various optical glasses, ultraviolet fused silica (UVFS), calcium fluoride (CaF₂), barium fluoride (BaF₂), magnesium fluoride (MgF₂), lithium fluoride (LiF), silicon (Si), K-208, zinc sulfide (ZnS), zinc selenide (ZnSe) and other materials.
| PV | Better Than λ/20 |
| RMS | Better Than λ/200 |
| Surface Quality | 60/40 ,40/20 ,20/ 10,20/10 |
| Parallelism | Better Than 1" |
| Diameter | Φ6mm-Φ300mm |
| Material | Various Optical Glasses, PC Plastic Material, PMMA, D-K9, ZnSe,Si, K208,radiation-resistant glass lens,Sapphire,Fused Quartz KrF/ArF Grade |
| Coating | Diamond like-carbon (DLC), High-efficiency anti-reflective coating(HE-AR coating), High Reflection |