| Specifications | According to customer's specific requirements |
| Material | Fused Silica (JGS1), Si, SiC, Ge |
| Diameter Tolerance | +0.0 / -0.01 mm |
| Central Thickness Tolerance | ±0.1mm |
| PV | λ/4 |
| Parallelism | <30'' |
| Surface Quality | 40/20 |
| Coating | Protected Aluminum,Protected Gold,Protected Silver (Ag+SiO₂),HR |